Thermopile Detector Array Program at JPL


M. Foote


Micromachined thermopile detector arrays have numerous space and commercial applications.  At JPL we have an established process for fabricating high-performance linear arrays of thermopile detectors using bulk micromachining.  In addition, we are developing a process for 2D arrays using surface micromachining techniques.  Both detector types use sputtered Bi-Te and Bi-Sb-Te thin film materials.  The bulk-micromachined detectors will be used in an atmospheric instrument for the NASA Mars 2005 orbiter, and in an Earth-observing radiation balance instrument.  This talk will include discussion of thermoelectric material deposition, detector fabrication, readout electronics, and applications


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